Fabrication of micro DOE using micro tools shaped with focused ion beam
نویسندگان
چکیده
منابع مشابه
Focused Ion Beam Micro Machining and Micro Assembly
The ability to manufacture and manipulate components at the micro-scale is critical to the development of micro systems. This paper presents the technique to manipulate micro/nano parts at the micro/nano-scale using an integrated Focused Ion Beam (FIB) system composed of scanning electron microscope, micro manipulator and gas injection system. Currently the smallest gears manufactured with trad...
متن کاملSilicon Micro/Nanomechanical Device Fabrication Based on Focused Ion Beam Surface Modification and KOH Etching
Selective Ga + ion implantation and miring by focused ion beam exposure and subsequent wet chemical etching is used to fabricate micro/nanomechanical elements in Si. Freestanding elements with a ~ 30 nm membrane thickness are made by controlled selective underetching between unexposed and exposed areas. Ultrahigh-frequency cantilever beams have been made with resonances in the tens of MHz range...
متن کاملIntegration of micro-optical elements with top-end of fibers via focused ion beam direct fabrication [5636-21]
Integration of micro-optical elements (MOEs) with optical fiber at top-end was realized by use of focused ion beam (FIB) direct milling. The designed MOEs (micro-refractive lens, microdiffractive lens with continuous relief, and micro-gratings) were directly milled by the FIB with ion energy and ion beam current of 40 keV and 569 pA, respectively, in the core area of both single mode fiber and ...
متن کاملNanoimprint lithography with a focused laser beam for the fabrication of micro-/nano-hybrid patterns†
A simple process which utilizes a 2D stamp based on UV-NIL is proposed. The main idea is to control the cured region on the micrometer scale by using a developable resist. For the conventional UV-NIL process, a collimated UV light is transmitted through the transparent stamp to cure the overall resist as shown in Fig. S1a. However, if the size of the UV light is reduced, the cured region of the...
متن کاملMicro-scale residual stress relaxation measurements using focused ion beam slotting and digital image correlation
The research presented in this summary was carried out by the author as part of his fourth-year group industrial project [1], in pursuit of the degree Master of Engineering in Mechanical Engineering at the University of Bristol. The project, Measurement of residual stress in heterogeneous materials, was conducted with three other students and consisted of experimental work at the microand macro...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Optics Express
سال: 2010
ISSN: 1094-4087
DOI: 10.1364/oe.18.008025